Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film
申请人:FUJIFILM Corporation
公开号:US11249395B2
公开(公告)日:2022-02-15
One embodiment of the present invention provides a pattern forming method including a step for forming an actinic ray-sensitive or radiation-sensitive film on a substrate using an actinic ray-sensitive or radiation-sensitive resin composition, a step for forming an upper layer film on the actinic ray-sensitive or radiation-sensitive film using a composition for forming an upper layer film, a step for exposing a laminate film including the actinic ray-sensitive or radiation-sensitive film and the upper layer film, and a step for developing the exposed laminate film using a developer including an organic solvent. The composition for forming an upper layer film contains a resin (XA), a resin (XB) containing fluorine atoms, a basic compound (XC), and a solvent (XD), and the resin (XA) is a resin not containing fluorine atoms, or in a case where the resin (XA) contains fluorine atoms, the resin (XA) is a resin having a lower content of fluorine atoms than that in the resin (XB), based on a mass.
本发明的一个实施例提供了一种图案形成方法,包括使用感光树脂或辐射敏感树脂组合物在基底上形成感光膜或辐射敏感膜的步骤、使用用于形成上层薄膜的组合物在感光膜或辐射敏感膜上形成上层薄膜的步骤,曝光包括感光膜或辐射敏感膜和上层薄膜的层压薄膜的步骤,以及使用包括有机溶剂的显影剂显影曝光的层压薄膜的步骤。用于形成上层薄膜的组合物包含树脂 (XA)、含氟原子的树脂 (XB)、碱性化合物 (XC) 和溶剂 (XD),并且树脂 (XA) 是不含氟原子的树脂,或者在树脂 (XA) 含有氟原子的情况下,树脂 (XA) 是氟原子含量低于树脂 (XB) 中氟原子含量的树脂(基于质量)。