Incorporated carboxy substituted p-phenylenediamine color developer
申请人:GAF Corporation
公开号:US04066456A1
公开(公告)日:1978-01-03
A derivative of paraphenylenediamine, for use as a color developer, having a primary amino group available for oxidative coupling, and a carboxy group bound to the benzene ring to provide the compound with the required stability to enable the compound to be incorporated into a photographic film, the compound being non-diffusible during development of the photographic film in an alkaline processing solution.
CHEMICAL MECHANICAL POLISHING AND WAFER CLEANING COMPOSITION COMPRISING AMIDOXIME COMPOUNDS AND ASSOCIATED METHOD FOR USE
申请人:Lee Wai Mun
公开号:US20090130849A1
公开(公告)日:2009-05-21
A composition and associated method for chemical mechanical planarization (or other polishing) is described. The composition contains an amidoxime compound and water. The composition may also contain an abrasive and a compound with oxidation and reduction potential. The composition is useful for attaining improved removal rates for metal, including copper, barrier material, and dielectric layer materials in metal CMP. The composition is particularly useful in conjunction with the associated method for metal CMP applications.
METHODS OF CLEANING SEMICONDUCTOR DEVICES AT THE BACK END OF LINE USING AMIDOXIME COMOSITIONS
申请人:Lee Wai Mun
公开号:US20100043823A1
公开(公告)日:2010-02-25
The present invention relates to aqueous compositions comprising amidoxime compounds and methods for cleaning plasma etch residue from semiconductor substrates including such dilute aqueous solutions. The compositions of the invention may optionally contain one or more other acid compounds, one or more basic compounds, and a fluoride-containing compound and additional components such as organic solvents, chelating agents, amines, and surfactants. The invention also relates to a method of removing residue from a substrate during integrated circuit fabrication.
The present invention is a novel aqueous cleaning solution for use in semiconductor front end of the line (FEOL) manufacturing process wherein the cleaning solution comprises at least one amidoxime compound.
本发明是一种用于半导体前端制造过程中的新型水性清洗溶液,其中清洗溶液包含至少一种酰胺肟化合物。
METHODS OF POST CHEMICAL MECHANICAL POLISHING AND WAFER CLEANING USING AMIDOXIME COMPOSITIONS
申请人:Lee Wai Mun
公开号:US20090133716A1
公开(公告)日:2009-05-28
The invention relates to a method for the removal of residues and contaminants from metal or dielectric surfaces and to a method for chemical mechanical polishing of a copper or aluminum surface. The methods of the invention include using an aqueous amidoxime complex agent. Optionally, the pH of the solution can be adjusted with an acid or base. The method includes applying the above composition to the copper or aluminum surface and polishing the surface in the presence of the composition.