ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, MASK BLANK PROVIDED WITH ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PHOTOMASK, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, ELECTRONIC DEVICE, COMPOUND, AND METHOD FOR PRODUCING COMPOUND
申请人:FUJIFILM Corporation
公开号:US20160280621A1
公开(公告)日:2016-09-29
The composition contains an alkali-soluble resin and a crosslinking agent that is represented by the following General Formula (I). In the formula, each of R
1
and R
6
independently represents a hydrogen atom or a hydrocarbon group having 5 or less carbon atoms; each of R
2
and R
5
independently represents an alkyl group, a cycloalkyl group, an aryl group, or an acyl group; and each of R
3
and R
4
independently represents a hydrogen atom or an organic group having 2 or more carbon atoms, and R
3
and R
4
may be bonded to each other to form a ring.
A monomer of formula (1) is provided wherein R
1
is hydrogen or a monovalent C
1
-C
6
hydrocarbon group, and R
2
is a group having polymerization functionality. Using the monomer, crosslinking units can be incorporated into a polymer chain. A chemically amplified negative resist composition comprising a base polymer having crosslinking units incorporated therein has a high sensitivity and forms a resist pattern with minimized LER.
Polymer, chemically amplified negative resist composition, and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2412733B1
公开(公告)日:2016-03-23
New Azt Conjugates as Potent Anti-HIV Agents
作者:Zhengqing You、Henry Joung Lee
DOI:10.1080/15257770500377789
日期:2006.1
In an attempt to discover anti-HIV agents with much reduced cytotoxicity from the currently available HIV-reverse transcriptase inhibitors, AZT conjugates of cholanic acids, 2-imidazolidone-4- carboxylic acid and its derivatives, and N, N'-disubstituted 5-hydroxy-tetrahydropyrimidin-2-ones have been synthesized and their anti-HIV profiles determined with CEM-SS cell line. The AZT conjugates with 2-imidazolidone-4- carboxylic acid and 2-pyrrolidone-5-carboxylic acid through an ester linkage, and with N,N'-diphenyl-5-hydroxy-tetrahydropyrimidin-2-one through a succinate tether showed significantly higher therapeutic indexes than AZT while they also retained or enhanced AZT's anti-HIV activity. Thus, structural features that favor the desired therapeutic profile of the conjugates appear to include a five-membered ring cyclic urea or lactam, and six-membered ring cyclic urea with N,N'-diphenyl substitution.