A chemical amplification type resist composition contains as a photoacid generator a sulfonyldiazomethane compound of formula (1) wherein R is H or C
1-4
alkyl or alkoxy, G is SO
2
or CO, R
3
is C
1-10
alkyl or C
6-14
aryl, p is 1 or 2, q is 0 or 1, p+q=2, n is 0 or 1, m is 3 to 11, and k is 0 to 4. The composition is suited for microfabrication, especially by deep UV lithography because of many advantages including improved resolution and improved pattern profile after development.
1
一种
化学放大型光刻胶组合物包含一种
化学放大型光酸发生剂,其
化学式为(1),其中R为H或C1-4烷基或烷氧基,G为SO2或CO,R3为C1-10烷基或C6-14芳基,p为1或2,q为0或1,p+q=2,n为0或1,m为3至11,k为0至4。该组合物适用于微细加工,尤其是通过深紫外光刻技术,因为具有许多优点,包括提高分辨率和在显影后改善图案轮廓。