Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.
对比度增强组合物可用于制造对比度增强层光刻胶复合材料。这种复合材料可用于在中紫外光下制作图案化光刻胶,并利用可光漂白的烷基
硝基化合物。