申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:EP2599814A1
公开(公告)日:2013-06-05
The object is to provide a compound having high dissolvability in a safe solvent and high sensitivity, and also capable of obtaining a good resist pattern shape, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition.
The solving means are a compound (B) obtained by reaction between a polyphenol based cyclic compound (A) and a compound (C) having a particular structure, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition.
本发明的目的是提供一种在安全溶剂中具有高溶解性和高灵敏度并能获得良好抗蚀剂图案形状的化合物、一种含有该化合物的辐射敏感组合物以及一种使用该组合物的抗蚀剂图案形成方法。
解决方法是由基于多酚的环状化合物(A)和具有特定结构的化合物(C)反应得到的化合物(B),含有该化合物的辐射敏感性组合物,以及使用该组合物的抗蚀剂图案形成方法。