Zur hydrolyse von monoorganylzinn-trihalogeniden III. Isolierung und röntgenstrukturanalyse von verbindungen mit dem neuartigen käfig-ion [(i-PrSn)12O14(OH)6]2+
SEMICONDUCTOR RESIST COMPOSITION, AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
申请人:Samsung SDI Co., Ltd.
公开号:US20200117085A1
公开(公告)日:2020-04-16
This disclosure relates to a semiconductor resist composition including an organometallic compound represented by Chemical Formula 1 and a solvent, and to a method of forming patterns using the composition:
wherein, in Chemical Formula 1, R
1
is an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or an -alkylene-O-alkyl group, and R
2
to R
4
are each independently selected from —OR
a
and —OC(═O)R
b
.
The monoorganotin hydroxide dihalide hydrates RSn(OH)Cl2 · H2O with R = i-butyl and i-propyl were investigated by an X-ray diffraction study. The crystal structure consists of dimeric units with a rhombic four-membered tinoxygen ring and octahedrally coordinated tin atoms. These molecules are bonded by OH ... Cl hydrogen bridges to chains which are linked to layers.
[EN] ORGANOMETALLIC SOLUTION BASED HIGH RESOLUTION PATTERNING COMPOSITIONS AND CORRESPONDING METHODS<br/>[FR] COMPOSITIONS POUR LA FORMATION DE MOTIFS À HAUTE RÉSOLUTION À BASE DE SOLUTIONS ORGANOMÉTALLIQUES ET PROCÉDÉS CORRESPONDANTS
申请人:INPRIA CORP
公开号:WO2016065120A1
公开(公告)日:2016-04-28
Organometallic radiation resist compositions are described based on tin ions with alkyl ligands. Some of the compositions have branched alkyl ligands to provide for improved patterning contrast while maintaining a high degree of solution stability. Blends of compounds with distinct alkyl ligands can provide further improvement in the patterning. High resolution patterning with a half-pitch of no more than 25 nm can be achieved with a line width roughness of no more than about 4.5 nm. Synthesis techniques have been developed that allow for the formation of alkyl tin oxide hydroxide compositions with very low metal contamination.
Synthese, kristallstruktur und reaktionen des isopropylzinntriisopropoxids, iPrSn(OiPr)3
作者:Hans Reuter、Dirk Schröder
DOI:10.1016/0022-328x(93)80384-n
日期:1993.8
iPrSn(OiPr)3 has been prepared by the reaction of isopropyltin trichloride with three equivalents of potassium isopropoxide. Its structure in a diluted solution of CDCl3 was studied by 13C and 119Sn NMR spectroscopy, showing that the compound is monomeric. The isotropic 119Sn shift value obtained by CP/MAS experiments, however, indicates association in the solid. The degree of aggregation was confirmed
我PrSn(O我PR)3已经制备由三氯化isopropyltin具有三个当量的异丙醇钾的反应。通过13 C和119 Sn NMR光谱研究了其在CDCl 3稀释溶液中的结构,表明该化合物是单体。然而,通过CP / MAS实验获得的各向同性119 Sn位移值表明了固体中的缔合。通过单晶X射线衍射研究证实了聚集程度,显示出具有四元SnO骨架和锡三角-双锥体配位的二聚体结构。给出了标题化合物与不同量的水的反应。
Proton magnetic resonance and infrared spectral parameters for the tin-hydrogen bond in some alkyl- and phenylstannanes
作者:M.L. Maddox、N. Flitcroft、H.D. Kaesz
DOI:10.1016/s0022-328x(00)82366-9
日期:1965.7
The possibility of donor-acceptor interaction between amines or phosphines and stannane or the alkylstannanes is investigated by proton magnetic resonance; present evidence is in the negative for a strong interaction. A correlationbetween Sn-H couplingconstant and Sn-H stretchingfrequency and the properties of alkyl groups in alkylstannanes is proposed.