Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
申请人:Breyta Gregory
公开号:US20050124828A1
公开(公告)日:2005-06-09
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted αβ-unsaturated esters. The fluoroalkanol-substituted αβ-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
Precursors to Fluoroalkanol-Containing Olefin Monomers, and Associated Methods of Synthesis and Use
申请人:Breyta Gregory
公开号:US20080033200A1
公开(公告)日:2008-02-07
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.