The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
这项发明提供了烯烃氟烷醇和
氟代多元醇前体,用于制备氟烷醇取代的α,β-不饱和酯。这些氟烷醇取代的α,β-不饱和酯是烯烃,可以方便地聚合,从而提供在光刻光阻组合物中有用的氟烷醇取代聚合物。还提供了合成烯烃氟烷醇和
氟代多元醇前体的方法。