FLUORINE-CONTAINING COMPOUND, FLUORINE-CONTAINING POLYMER, RESIST COMPOSITION AND RESIST PROTECTIVE FILM COMPOSITION
申请人:Asahi Glass Company, Limited
公开号:EP1772468A1
公开(公告)日:2007-04-11
To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength range, and a resist composition and a composition for a resist protective film, comprising the fluoropolymer.
A fluoropolymer having monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (1) :
CF2=CFCF2C(CF3) (OR1)-(CH2)nCR2=CHR3 (1)
wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 is a hydrogen atom or an alkyl group having at most 20 carbon atoms), each of R2 and R3, which are independent of each other, is a hydrogen atom or an alkyl group having at most 12 carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.
提供一种具有官能团且在宽波长范围内具有高透明度的含氟聚合物,以及包含该含氟聚合物的抗蚀剂组合物和抗蚀剂保护膜组合物。
一种含氟聚合物,其单体单元由式(1)代表的氟化二烯环聚合而成:
CF2=CFCF2C(CF3) (OR1)-(CH2)nCR2=CHR3 (1)
其中 R1 是氢原子、最多具有 20 个碳原子的烷基或 (CH2)aCOOR4 (其中 a 是 0 或 1,R4 是氢原子或最多具有 20 个碳原子的烷基),R2 和 R3 各自相互独立,是氢原子或最多具有 12 个碳原子的烷基,n 是 0 或 2,但当 n 为 0 时,R1、R2 和 R3 中至少有一个不是氢原子。