Electrochemical oxidation of sulfinic acids has been studied in aqueous solutions using cyclic voltammetry, controlled-potential coulometry, chronoamperometry and chronocoulometry methods. The results indicate that the oxidation of sulfinic acids is an irreversible one-electron transfer process. Our data also show that the electrogenerated sulfonyl radicals undergo a dimerization reaction to form disulfone derivatives. The present work has led to the development of a facile and environmentally friendly electrochemical method for the synthesis of diphenyl disulfone derivatives. (C) 2017 The Electrochemical Society. All rights reserved.
RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:US20160145231A1
公开(公告)日:2016-05-26
A resist composition containing a compound represented by the general formula (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, and an alcoholic compound that can be derived therefrom are described.
COMPOUND, RESIN, MATERIAL FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY, PATTERN FORMING METHOD, AND METHOD FOR PURIFYING THE COMPOUND OR RESIN
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:US20170073288A1
公开(公告)日:2017-03-16
The compound according to the present invention is represented by a specific formula. The compound according to the present invention has a structure according to the specific formula, and therefore can be applied to a wet process and is excellent in heat resistance and etching resistance. In addition, the compound according to the present invention has such a specific structure, and therefore has a high heat resistance, a relatively high carbon concentration, a relatively low oxygen concentration and also a high solvent solubility. Therefore, the compound according to the present invention can be used to form an underlayer film whose degradation is suppressed at high-temperature baking and which is also excellent in etching resistance to oxygen plasma etching or the like. Furthermore, the compound is also excellent in adhesiveness with a resist layer and therefore can form an excellent resist pattern.
Eine einfache und allgemeine Methode zur Herstellung von α-Disulfonen (R<sup>1</sup>SO<sub>2</sub>SO<sub>2</sub>R<sup>2</sup>)
作者:Ekkehard A. Bartmann
DOI:10.1055/s-1993-25891
日期:——
A Facile and General Method for the Preparation of α-Disulfones (R1SO2SO2R2) Dialkyl, diaryl and alkyl aryl disulfones are easily prepared by oxidation of N,N′-disulfonylhydrazines with nitric acid. The method is compatible with a wide variety of substituents (R1,R2) on the sulfur atoms.
practical synthesis of electrophilic sulfenylating reagents, thiosulfonates and disulfides, from inexpensive and easily available sulfonyl chlorides, has been developed. By appropriate choice of solvents, the reaction of sulfonyl chlorides and tetrabutylammonium iodide gave the target products in good to excellent yields, respectively. These transformations probably proceed through a reducing–coupling
NOVEL TETRACARBOXYLIC DIANHYDRIDE, POLYIMIDE RESIN AND METHOD FOR PRODUCING THE SAME, PHOTOSENSITIVE RESIN COMPOSITIONS, PATTERNING PROCESS, METHOD FOR FORMING CURED FILM, INTERLAYER INSULATING FILM, SURFACE PROTECTIVE FILM, AND ELECTRONIC PARTS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20190169211A1
公开(公告)日:2019-06-06
The present invention has been made in view of the circumstances herein. An object of the present invention is to provide: a tetracarboxylic dianhydride which can lead to a polyimide usable as a base resin of a photosensitive resin composition capable of forming a fine pattern and obtaining high resolution without impairing excellent characteristics such as mechanical strength and adhesiveness; a polyimide resin obtained by using the tetracarboxylic dianhydride; and a method for producing the polyimide resin. The tetracarboxylic dianhydride is shown by the following general formula (1).