申请人:Suzuki Issei
公开号:US20110300482A1
公开(公告)日:2011-12-08
There is provided a sulfonium salt having high photosensitivity to the i-line. The invention relates to a sulfonium salt represented by formula (1) described below: [in formula (1), R
1
to R
6
each independently represent an alkyl group, a hydroxy group, an alkoxy group, an alkylcarbonyl group, an arylcarbonyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, an arylthiocarbonyl group, an acyloxy group, an arylthio group, an alkylthio group, an aryl group, a heterocyclic hydrocarbon group, an aryloxy group, an alkylsulfinyl group, an arylsulfinyl group, an alkylsulfonyl group, an arylsulfonyl group, a hydroxy(poly) alkyleneoxy group, an optionally substituted amino group, a cyano group, a nitro group, or a halogen atom, m
1
to m
6
each represent the number of occurrences of each of R
1
to R
6
, m
1
, m
4
, and m
6
each represent an integer of 0 to 5, m
2
, m
3
, and m
5
each represent an integer of 0 to 4, and X
−
represents a monovalent polyatomic anion].
提供了一种具有对i线高光敏度的磺鎓盐。本发明涉及一种由下式(1)表示的磺鎓盐:[在式(1)中,R1至R6各自独立地表示烷基、羟基、烷氧基、烷基羰基、芳基羰基、烷氧羰基、芳氧羰基、芳基硫代羰基、酰氧基、芳基硫基、烷基硫基、芳基、杂环碳氢基、芳氧基、烷基亚砜基、芳基亚砜基、烷基磺酰基、芳基磺酰基、羟基(聚)烷氧基、可选取代的氨基、氰基、硝基或卤素原子,m1至m6各自表示R1至R6的出现次数,其中m1、m4和m6各自表示0至5的整数,m2、m3和m5各自表示0至4的整数,X-表示单价多原子阴离子]。