RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND COMPOUND
申请人:JSR Corporation
公开号:US20130216951A1
公开(公告)日:2013-08-22
A radiation-sensitive resin composition includes a polymer, an acid generating agent, and an organic solvent. The polymer includes a first structural unit derived from a compound represented by a formula (1), and a second structural unit derived from a compound represented by a formula (2). R
1
represents an organic group having a valency of (a+2) that represents a ring structure having 3 to 8 carbon atoms together with the carbon atom constituting a lactone ring. R
2
represents a fluorine atom, a hydroxyl group, an organic group having 1 to 20 carbon atoms or the like.
RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER, AND COMPOUND
申请人:JSR Corporation
公开号:EP2623558A1
公开(公告)日:2013-08-07
A radiation-sensitive resin composition includes: a polymer having a first structural unit derived from a compound represented by a formula (1), and a second structural unit derived from a compound represented by a formula (2); an acid generator; and an organic solvent. In the formula (1), R1 represents a ring structure having 3 to 8 carbon atoms taken together with a carbon atom constituting a lactone ring; R2 represents a fluorine atom, a hydroxyl group or an organic group having 1 to 20 carbon atoms; and a is an integer of 0 to 6. In a case where a is 2 or greater, a plurality of R2s are identical or different, or represent a ring structure taken together with each other. At least one group of R1 and R2 has a hetero atom or a halogen atom.