申请人:FUJIMI INCORPORATED
公开号:EP2348080A1
公开(公告)日:2011-07-27
A polishing composition of the present invention contains an oxidant, an anticorrosive, and a surfactant comprising a compound represented by Chemical Formula 1:
One to three of R1 to R5 in Chemical Formula 1 are alkyl groups, alkynyl groups, alkenyl groups, aryl groups, or arylalkylene groups, one is a hydrogen atom or an alkyl group having 1 to 9 carbon atoms, and the remainder are hydrogen atoms. OR6 is oxyethylene, oxypropylene, or a random or block conjugate of oxyethylene and oxypropylene. n is an integer of 1 or more. X is an OSO3- group, an OPO32- group, or an OH group.
本发明的抛光组合物含有氧化剂、防腐剂和表面活性剂,其中表面活性剂由化学式 1 所代表的化合物组成:
化学式 1 中 R1 至 R5 的一至三个是烷基、炔基、烯基、芳基或芳基亚烷基,一个是氢原子或具有 1 至 9 个碳原子的烷基,其余是氢原子。OR6 是氧乙烯、氧丙烯或氧乙烯和氧丙烯的无规或嵌段共轭物。X 是 OSO3- 基团、OPO32- 基团或 OH 基团。