POLYMERIZABLE ESTER COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:HASEGAWA Koji
公开号:US20130017484A1
公开(公告)日:2013-01-17
Polymerizable ester compounds having formula (1) are novel wherein R
1
is H, F, methyl or trifluoromethyl, R
2
is an acid labile group, Aa is a divalent hydrocarbon group which may be separated by —O— or —C(═O)—, and k
1
is 0 or 1. They are useful as monomers to produce polymers which are transparent to radiation ≦500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent developed properties.