MULTIPLE SUBSTITUTED CYCLOPENTADIENYL RARE-EARTH COMPLEXES AS PRECURSORS FOR VAPOR PHASE THIN FILM DEPOSITION PROCESSES
申请人:[en]MERCK PATENT GMBH
公开号:WO2024050202A1
公开(公告)日:2024-03-07
The disclosed and claimed subject matter provides precursors having at least one tethered cyclopentadienyl ligand ("Cp ligand"), at least one amidinate ligand ("Ad ligand") and a lanthanide and/or lanthanide-like transition metal ("M") of the general formulae (i) (Cp ligand)2-M-(Ad ligand) or (ii) (Cp ligand)-M-(Ad ligand)2.
Treibs, Chemische Berichte, 1933, vol. 66, p. 610,618