申请人:Wako Pure Chemical Industries, Ltd.
公开号:US05350660A1
公开(公告)日:1994-09-27
A resist material comprising (a) a polymer having a monomer unit having a special functional group, a monomer unit having a phenolic hydroxyl group, and if necessary a third monomer unit, (b) a photoacid generator, and (c) a solvent can provide a resist film excellent in heat resistance and adhesiveness to a substrate when exposed to light with 300 nm or less such as deep UV light, KrF excimer laser light, etc., and is suitable for forming ultrafine patterns.
一种抗性材料,包括(a)聚合物,其具有具有特殊功能基团的单体单位,具有酚羟基的单体单位,必要时还包括第三单体单位,(b)光酸发生剂和(c)溶剂,当暴露于300纳米以下的光线(如深紫外线光、KrF准分子激光等)时,可以提供优异的耐热性和与基板的粘附性,并适用于形成超细图案。