Novel Sr and Ba complexes containing both beta-diketonates and N-methyl-pyrrolidone were synthesized and characterized. TGA experiments indicated these complexes are volatile, they can be employed as potential precursors for ALD strontium titanate (STO) or barium strontium titanate films (BST) films in semiconductor fabrication.
合成并表征了含有
β-二酮和
N-甲基吡咯烷酮的新型Sr和Ba配合物。TGA实验表明这些配合物具有挥发性,它们可以作为潜在的前驱物在半导体制造中用于ALD
钛酸锶(STO)或
钡钛酸锶(BST)薄膜的制备。