Composition for forming silicon-containing film, silicon-containing film-formed substrate and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2172807A1
公开(公告)日:2010-04-07
There is disclosed a thermosetting composition for forming a silicon-containing film to form a silicon-containing film formed in a multilayer resist process used in lithography, including at least (A) a silicon-containing compound obtained by hydrolyzing and condensing a hydrolyzable silicon compound using an acid as a catalyst, (B) a thermal crosslinking accelerator (C) a monovalent or bivalent or more organic acid having 1 to 30 carbon atoms, (D) trivalent or more alcohol and (E) an organic solvent. There can be provided a composition for a silicon-containing film which can form a good pattern in a photoresist film, can form a silicon-containing film for an etching mask having a good dry etching resistance, can give a good storage stability and can be delaminated with a solution used in a delamination process in a multilayer resist process used for lithography, a substrate on which the silicon-containing film is formed, and further a method for forming a pattern.
本发明公开了一种用于形成含硅薄膜的热固性组合物,该组合物用于形成在光刻中使用的多层抗蚀剂工艺中形成的含硅薄膜,至少包括(A)通过使用酸作为催化剂水解和缩合可水解硅化合物而获得的含硅化合物,(B)热交联促进剂,(C)具有 1 至 30 个碳原子的一价或二价或更多有机酸,(D)三价或更多醇,以及(E)有机溶剂。本发明可以提供一种含硅薄膜的组合物,该组合物可以在光刻胶膜中形成良好的图案,可以形成用于蚀刻掩膜的含硅薄膜,该薄膜具有良好的耐干蚀刻性,可以提供良好的储存稳定性,并且可以用用于光刻的多层抗蚀剂工艺中的分层工艺中使用的溶液进行分层,还可以提供一种在其上形成含硅薄膜的基底,以及进一步提供一种形成图案的方法。