An actinic ray-sensitive or radiation-sensitive resin composition comprising any of the compounds of general formula (I) below; wherein: Ar represents an aromatic ring that may have a substituent other than the -(A-B) groups; n is an integer of 1 or greater; A represents any one, or a combination of two or more members selected from a single bond, an alkylene group, -O-, -S-, -C(=O)-, -S(=O)-, -S(=O)?2- and OS(=O)2-, provided that -C(=O)O- is excluded; B represents a group containing a hydrocarbon group having 4 or more carbon atoms wherein either a tertiary or a quaternary carbon atom is contained, when n is 2 or greater, the two or more -(A-B) groups may be identical to or different from each other; and M+ represents an organic onium ion.
一种光
化学射线敏感性或辐射敏感性
树脂组合物,包括下面的通式(I)中的任何一种化合物;其中:Ar代表可能具有除了-(A-B)基团之外的取代基的芳香环;n为大于等于1的整数;A代表从单键、烷基基团、-O-、-S-、-C(=O)-、-S(=O)-、-S(=O)2-和OS(=O)2-中选取的任意一个或两个以上成员的组合,但不包括-C(=O)O-;B代表含有4个或更多碳原子的烃基团的基团,当n大于等于2时,两个或更多个-(A-B)基团可以相同或不同;M+代表有机离子。