COMPOUND HAVING ALICYCLIC STRUCTURE, (METH)ACRYLIC ACID ESTER, AND PROCESS FOR PRODUCTION OF THE (METH)ACRYLIC ACID ESTER
申请人:Tanaka Shinji
公开号:US20110009661A1
公开(公告)日:2011-01-13
Provided are an alicyclic structure-containing compound, a (meth)acrylate, and a method for producing the ester. The compound and the ester are useful as a monomer and the like for a photoresist used in semiconductor manufacturing and excellent in solubility, compatibility, defect reduction, roughness improvement, and the like, realized by using an alicyclic structure-containing compound containing a linking group having an ester bond and/or a linking group having an ether bond, a (meth)acrylate derived from the alicyclic structure-containing compound, and a method for producing the ester.
提供了一种含有脂环结构的化合物,一种(甲基)丙烯酸酯,以及一种生产酯的方法。该化合物和酯可用作半导体制造中用于光刻胶的单体等,并通过使用含有酯键的连接基团和/或含有醚键的连接基团的脂环结构化合物衍生的(甲基)丙烯酸酯,以及生产酯的方法,实现了在溶解性、相容性、缺陷减少、粗糙度改善等方面表现出色。