申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20200159119A1
公开(公告)日:2020-05-21
A resist composition including a structural unit represented by General Formula (a0-1), a structural unit containing a cyclic group in which —O—C(═O)— forms a part of a ring skeleton (excluding a cyclic group forming a cross-linked structure), and a structural unit represented by General Formula (a0-3); in the General Formula (a0-1), Rx
01
is an acid dissociable group represented by General Formula (a01-r-1) or General Formula (a01-r-2); in the Formula (a01-r-1) and Formula (a01-r-2), Xa and Ya, and Xaa and Yaa are groups that together form an aliphatic cyclic group that does not have a cross-linked structure; in General Formula (a0-3), Ya
x3
is a single bond or an (n
ax3
+1)-valent linking group.