A chemical amplification type positive resist composition comprising a novolak resin, a resin insoluble or poorly soluble itself in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid, and an acid generator, wherein when the novolak resin is measured by gel permeation chromatography (GPC) using a 254 nm UV detector using polystyrene as a standard, the area ratio of components having molecular weights of 1000 or less is 25% or less based on the total pattern area excepting unreacted monomers; and the chemical amplification type positive resist composition can reduce cost without deteriorating basic abilities such as sensitivity, resolution and the like, and shows small unevenness due to standing wave, and can improved pattern profile, particularly, line edge roughness.
一种
化学增强型正性光刻胶组合物,包括诺伍拉克
树脂、一种在碱性
水溶液中本身不溶或难溶,但在酸的作用下变得可溶于碱性
水溶液的
树脂,以及酸发生剂。其中,当使用254nm紫外线检测器以聚
苯乙烯为标准,通过凝胶渗透色谱(
GPC)测量诺伍拉克
树脂时,分子量小于1000的组分的面积比例在除未反应单体外的总图案面积中为25%或以下。该
化学增强型正性光刻胶组合物可以降低成本而不会破坏基本能力,如灵敏度、分辨率等,并且由于驻波引起的不均匀性小,可以提高图案轮廓,尤其是线边粗糙度。