A novel silane compound is disclosed, which is used as a suitable strating material (monomer) of polysilane eligible for the precursor of electroconductive- and photoconductive-materials such as phtoresists as well as polymerization initiators and silicone carbide-based ceramics and which is useful for chemical vapor deposition.
本发明公开了一种新型的
硅烷化合物,可用作适合聚
硅烷先驱体的起始材料(单体),用于制备电导和光导材料(如光刻胶)、聚合
引发剂、基于碳化
硅的陶瓷材料,以及
化学气相沉积。