RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER, COMPOUND, AND METHOD FOR PRODUCING COMPOUND
申请人:JSR CORPORATION
公开号:US20140186771A1
公开(公告)日:2014-07-03
A radiation-sensitive resin composition includes a polymer that includes a structural unit represented by a formula (1), and an acid generator. R
1
is a hydrogen atom, a fluorine atom, or the like. R
2
is a hydrogen atom or a monovalent hydrocarbon group. R
3
is a hydrogen atom, a monovalent chain hydrocarbon group, or the like. R
4
is a hydrogen atom, a monovalent chain hydrocarbon group, or the like. R
5
is a hydrogen atom, a monovalent chain hydrocarbon group, or the like. R
6
is a monovalent chain hydrocarbon group. R
6
is bonded to R
3
to form a first alicyclic structure, or R
6
is bonded to R
5
to form a second alicyclic structure. At least one hydrogen atom of R
2
, R
3
, or R
4
is optionally substituted with a fluorine atom.
一种辐射敏感树脂组合物,包括聚合物,该聚合物包括由式(1)表示的结构单元和酸发生剂。其中R1为氢原子、氟原子或类似物。R2为氢原子或一价碳氢基团。R3为氢原子、一价链状碳氢基团或类似物。R4为氢原子、一价链状碳氢基团或类似物。R5为氢原子、一价链状碳氢基团或类似物。R6为一价链状碳氢基团。R6与R3结合形成第一脂环结构,或R6与R5结合形成第二脂环结构。R2、R3或R4中的至少一个氢原子可以被氟原子取代。