Fluorinated Aminoalkoxide and Ketoiminate Indium Complexes as MOCVD Precursors for In<sub>2</sub>O<sub>3</sub> Thin Film Deposition
作者:Tsung-Yi Chou、Yun Chi、Shu-Fen Huang、Chao-Shiuan Liu、Arthur J. Carty、Ludmila Scoles、Konstantin A. Udachin
DOI:10.1021/ic034588x
日期:2003.9.1
The syntheses of two distinctive types of indium complex derived from trimethylindium (InMe(3)) are reported. The first kind has a generalized structural formula [InMe(2)(amak)](2), where (amak)H is an abbreviation for a series of chelating amino alcohol ligands HOC(CF(3))(2)CH(2)NHR, R = (CH(2))(2)OMe (1), Me (2), and Bu(t) (3), as well as HOC(CF(3))(2)CH(2)NMe(2) (4); while the second type of complex
报道了从三甲基铟(InMe(3))衍生的两种独特类型的铟配合物的合成。第一种具有通用的结构式[InMe(2)(amak)](2),其中(amak)H是一系列螯合氨基醇配体HOC(CF(3))(2)CH(2)的缩写)NHR,R =(CH(2))(2)OMe(1),Me(2)和Bu(t)(3)以及HOC(CF(3))(2)CH(2) NMe(2)(4); [InMe(2)(keim)](5)说明了第二种络合物,其中(keim)H是结构式为O = C(CF(3))CH(2)C的三齿酮亚胺配体(CF(3))= NCH(2)CH(2)NMe(2)。使用单晶X射线衍射研究确定2和5的固态结构。对于氨基醇盐配合物2-4,已经确定了固态的二聚In(2)O(2)核心结构的存在,其氨基片段位于醇盐配体的反式位置,在分子排列中与酮亚胺酸盐配合物5观察到的扭曲的三角双锥体几何形状相反。此外,对2的VT NMR研究表明,N->