[EN] ACRYLAMIDE-SUBSTITUTED INDANE COMPOUNDS AND THERAPEUTIC USE THEREOF [FR] COMPOSÉS D'INDANE À SUBSTITUTION ACRYLAMIDE ET LEUR UTILISATION THÉRAPEUTIQUE
COMPOUND, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160053032A1
公开(公告)日:2016-02-25
A resist composition has a resin (A1) including a structural unit having an acid-labile group, a resin (A2) including a structural unit having a group represented by formula (Ia), and an acid generator.
wherein R
1
in each occurrence independently represents a fluorine atom or a C
1
to C
6
fluorinated alkyl group, ring W represents a C
5
to C
18
alicyclic hydrocarbon group, n represents an integer of 1 to 6, and * represents a binding site.