申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:EP1739485A1
公开(公告)日:2007-01-03
A radiation-sensitive composition containing a resist compound A, an acid generator B, and an acid crosslinking agent C. The resist compound A is (a) a polyphenol compound which is produced by the condensation of a C5-45 aromatic ketone or aromatic aldehyde with a C6-15 compound having from 1 to 3 phenolic hydroxyl groups, and, (b) its molecular weight is form 300 to 5000. The radiation-sensitive composition is solvent-soluble and exhibits a high sensitivity, high resolution, and high heat resistance.
抗蚀剂化合物 A 是:(a) 一种多酚化合物,由 C5-45 芳香酮或芳香醛与具有 1 至 3 个酚羟基的 C6-15 化合物缩合而成;(b) 其分子量为 300 至 5000。辐射敏感组合物可溶于溶剂,具有高灵敏度、高分辨率和高耐热性。