Facile preparation and synthetic applications of LiCH2C(CF3)2OLi
摘要:
Bromohydrin BrCH2C(CF3)(2)OH readily reacts with two equivalents of n-BuLi at -78 degreesC to produce the corresponding dilithium derivative LiCH2C(CF3)(2)OLi in high yield. This dilithiated derivative reacts selectively, acting as a C-nucleophile, with a variety of electrophiles such as R2PCl, carbonyl compounds, and epoxides, to give electron-deficient phosphines R2PCH2C(CF3)(2)OH, 1,3- and 1,4-diols, correspondingly. (C) 2002 Elsevier Science B.V. All rights reserved.
POLYMERIZABLE TERTIARY ESTER COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20130189620A1
公开(公告)日:2013-07-25
The present invention provides a polymerizable tertiary ester compound represented by the following general formula (1a) or (1b). There is provided a polymerizable ester compound useful as a monomer for a base resin of a resist composition having a high resolution and a reduced pattern edge roughness in photolithography using a high-energy beam such as an ArF excimer laser light as a light source, especially in immersion lithography, a polymer containing a polymer of the ester compound, a resist composition containing the polymer as a base resin, and a patterning process using the resist composition.