IONIC LIQUID MEDIUMS FOR HOLDING SOLID PHASE PROCESS GAS PRECURSORS
申请人:Torres, JR. Robert
公开号:US20090320771A1
公开(公告)日:2009-12-31
Ionic fluid mixtures are described that include an ionic liquid and a solid-phase material. The ionic liquid and the solid-phase material are selected to convert the solid-phase material into a gas phase material at a temperature that is lower than a conversion of the ionic liquid into a gas phase ionic material. In addition, methods of supplying a gaseous precursor to an application are described. These methods include providing a mixture of an ionic liquid and a solid-phase starting material, heating the mixture to a temperature that vaporizes at least a portion of the solid-phase starting material into the gaseous precursor, and transporting the gaseous precursor from the mixture to the application that utilizes the gaseous precursor.