The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
本发明提供了适用于抗反射组合物(ARC)的新型光吸收交联组合物,尤其适用于深紫外线应用。本发明的 ARC 一般由
交联剂和新型 ARC
树脂粘合剂组成,可有效吸收反射的深紫外线照射辐射。