A chemically amplified positive resist composition is provided comprising a polymer PB having an amine structure bound thereto and a polymer PA comprising recurring units having an acidic side chain protected with an acid labile protective group and recurring units having an acid generating moiety on a side chain.
                            提供了一种
化学放大正抗蚀剂组合物,该组合物由具有胺结构的聚合物 PB 和聚合物 PA 组成,聚合物 PA 包含具有酸性侧链的递归单元,侧链上有可被酸溶解的保护基团和具有酸生成分子的递归单元。