A resist composition comprising a base polymer and a sulfonium salt of brominated indole or brominated indazole carboxylic acid offers a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.
抗蚀剂组合物由基质聚合物和
溴化
吲哚或
溴化
吲唑羧酸的锍盐组成,具有高灵敏度、最低 LWR 和更好的 CDU(与正色调或负色调无关)。