[DE] NEUE ERDALKALIMETALLKOMPLEXE UND IHRE VERWENDUNG [EN] NOVEL ALKALINE EARTH METAL COMPLEXES AND USE THEREOF [FR] NOUVEAUX COMPLEXES DE METAUX ALCALINO-TERREUX ET LEUR UTILISATION
β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same
申请人:SAMSUNG ELECTRONICS CO., LTD.
公开号:US09359382B2
公开(公告)日:2016-06-07
The β-ketoimine ligand is represented by the following formula 1:
wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the β-ketoimine ligand. A method of forming the β-ketoimine ligand and a method of forming a thin film using the metal complex compound including β-ketoimine ligand are provided.
Chelate complexes of calcium, strontium and barium formed with ligands that are beta-ketiminate compounds having a scorpion tail; intermediate compounds useful in producing the aforementioned complexes; a method for producing such complexes, and the use of such complexes for depositing layers containing calcium, barium or strontium.