PROCESS FOR PRODUCING ALKOXYCARBONYLFLUOROALKANESULFONATES
申请人:FUJIWARA Masaki
公开号:US20080108846A1
公开(公告)日:2008-05-08
A process for producing an alkoxycarbonylfluoroalkanesulfonate represented by the formula [1] is provided. This process includes the steps of (a) reacting a halofluoroalkanoate represented by the formula [2], with a sulfinating agent, thereby obtaining an alkoxycarbonylfluoroalkanesulfinate represented by the formula [3]; and (b) reacting the alkoxycarbonylfluoroalkanesulfinate with an oxidizing agent, thereby obtaining the target alkoxycarbonylfluoroalkanesulfonate. Furthermore, it is possible to react the obtained alkoxycarbonylfluoroalkanesulfonate with a monovalent onium salt to conduct a salt exchange, thereby obtaining a alkoxycarbonylfluoroalkanesulfonic acid onium salt represented by the formula [4].
Compound for Photoacid Generator, Resist Composition Using the Same, and Pattern-Forming Method
申请人:Central Glass Company, Limited
公开号:US20130130175A1
公开(公告)日:2013-05-23
A sulfonic acid onium salt represented by the following formula (1) useful as a superior radiosensitive acid generator for resist compositions. It is possible to form a good pattern by using a resist composition containing this sulfonic acid onium salt corresponding to the formula (1):
in which R
1
represents a monovalent organic group, and Q
+
represents a sulfonium cation or iodonium cation.
secondary alkylamines with activemethylenecompounds afforded mono-sulfenylated compounds in good yields. The reactions of 2 mol of sulfenamides derived from imides with 1 mol of activemethylenecompounds in the presence of a base gave di-sulfenylated compounds. It was found that α-mono-sulfenylated ketones were prepared by the reactions of enamines with sulfenamides derived from imides. α-gem-Di-sulfenylated
Under mild aprotic conditions α-halo carbonyl compounds react with diphenyl disulfide in the presence of sodium telluride to give the corresponding α-phenylthio derivatives in good to moderate yields. The reaction appears to proceed involving the sulfur–sulfurbondcleavage of diphenyl disulfide by sodium telluride.
A sulfonic acid derivative represented by the following general formula (1):
[Chemical formula 1]
RCOOCH
2
CH
2
CFHCF
2
SO
3
−
M
+
(1)
where R represents a substituted or unsubstituted C
1-30
linear, branched, or cyclic hydrocarbon group, or a substituted or unsubstituted C
6-30
aryl group, and M
+
represents a counter cation.