申请人:Kinsho Takeshi
公开号:US20070249858A1
公开(公告)日:2007-10-25
Polymerizable fluorinated ester compounds having formulae (1) and (2) are novel wherein R
1
is H, methyl or trifluoromethyl, R
2
and R
3
are H or a monovalent hydrocarbon group, R
2
and R
3
may form a ring, R
4
is H, OH or a monovalent hydrocarbon group, and R
5
is an acid labile group. They are useful as monomers to produce polymers for the manufacture of radiation-sensitive resist compositions which have high transparency to radiation having a wavelength of up to 500 nm and exhibit good development properties due to the presence of phenol-like acidic hydroxyl groups.
具有以下化学式(1)和(2)的可聚合氟化酯化合物是一种新颖化合物,其中R1为H、甲基或三氟甲基,R2和R3为H或一价碳氢基团,R2和R3可能形成环,R4为H、OH或一价碳氢基团,R5为酸不稳定基团。它们可用作单体,用于生产用于制造对波长高达500纳米的辐射具有高透明度并由于存在酚类酸性羟基团而表现出良好的显影性能的辐射敏感型抗蚀组合物的聚合物。