申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160130212A1
公开(公告)日:2016-05-12
A compound represented by formula (I), a resin including a structural unit derived from the compound and a resist composition including the resin:
wherein R
1
represents a hydrogen atom, a halogen atom or a C
1
to C
6
alkyl group in which a hydrogen atom may be replaced by a halogen atom, R
2
represents a C
1
to C
12
fluorinated saturated hydrocarbon group, A
1
represents a single bond, a C
1
to C
6
alkanediyl group or *-A
3
-X
1
-(A
4
-X
2
)a-(A
5
)b-, * represents a binding site to an oxygen atom, A
2
, A
3
, A
4
and A
5
each independently represent a C
1
to C
6
alkanediyl group, X
1
and X
2
each independently represent —O—, —CO—O— or —O—CO—, W
1
represents a C
5
to C
18
divalent alicyclic hydrocarbon group, a represents 0 or 1, and b represents 0 or 1.
化合物的化学式(I)所代表的化合物,包括从该化合物衍生的结构单元的树脂和包括该树脂的抗蚀组合物:其中R1代表氢原子、卤素原子或C1到C6烷基基团,其中氢原子可以被卤素原子取代,R2代表C1到C12氟化饱和碳氢基团,A1代表单键,C1到C6烷二基基团或*-A3-X1-(A4-X2)a-(A5)b-,*代表与氧原子的结合位点,A2、A3、A4和A5分别独立地代表C1到C6烷二基基团,X1和X2分别独立地代表—O—、—CO—O—或—O—CO—,W1代表C5到C18二价脂环碳氢基团,a代表0或1,b代表0或1。