COBALT COMPLEX, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING COBALT-CONTAINING THIN FILM
申请人:TOSOH CORPORATION
公开号:US20220017553A1
公开(公告)日:2022-01-20
To provide a cobalt complex which is liquid at room temperature, useful for producing a cobalt-containing thin film under conditions without using an oxidizing gas.
A cobalt complex represented by the following formula (1):
L
1
-Co-L
2
(1)
wherein L
1
and L
2
represent a unidentate amide ligand of the following formula (A), a bidentate amide ligand of the following formula (B) or a hetero atom-containing ligand of the following formula (C):
wherein R
1
and R
2
represent a C
1-6
alkyl group or a tri(C
1-6
alkyl)silyl group, and the wave line represents a binding site to the cobalt atom;
wherein R
3
represents a tri(C
1-6
alkyl)silyl group, R
4
and R
5
represent a C
1-4
alkyl group, and X represents a C
1-6
alkylene group;
wherein R
6
and R
8
represent a C
1-6
alkyl group, R
7
represents a hydrogen atom or a C
1-4
alkyl group, Y represents an oxygen atom or NR
9
, Z represents an oxygen atom or NR
10
, and R
9
and R
10
independently represent a C
1-6
alkyl group.
提供一种在室温下为液体的钴配合物,可用于在不使用氧化气体的条件下制备含钴薄膜。
由以下式(1)表示的钴配合物:
L1-Co-L2(1)
其中L1和L2表示以下式(A)的单齿酰胺配体,以下式(B)的双齿酰胺配体或以下式(C)的含杂原子配体:
其中R1和R2表示C1-6烷基或三(C1-6烷基)硅基团,波浪线表示与钴原子的结合位点;
其中R3表示三(C1-6烷基)硅基团,R4和R5表示C1-4烷基,X表示C1-6亚烷基团;
其中R6和R8表示C1-6烷基,R7表示氢原子或C1-4烷基,Y表示氧原子或NR9,Z表示氧原子或NR10,R9和R10独立表示C1-6烷基。