申请人:Canon Kabushiki Kaisha
公开号:US10189188B2
公开(公告)日:2019-01-29
A compound of Formula A-1:
where n is an integer and R is C1-10 alkyl. In some cases, n is an integer of 1 to 20 or 5 to 15. R may be substituted or unsubstituted. An adhesive composition may include a compound of Formula A-1. The adhesive composition may include at least one of a crosslinker, a catalyst, and a solvent. An imprint lithography stack may include a substrate and an adhesion layer adhered to the substrate, where the adhesion layer includes a compound of Formula A-1. Forming an adhesion layer on an imprint lithography substrate includes disposing an adhesive composition on the imprint lithography substrate and polymerizing the adhesive composition to yield the adhesion layer on the substrate, where the adhesive composition includes a compound of Formula A-1, where n is an integer and R is C1-10 alkyl.
式 A-1 的化合物:
其中 n 为整数,R 为 C1-10 烷基。在某些情况下,n 是 1 至 20 或 5 至 15 的整数。R 可以是取代或未取代的。粘合剂组合物可包括式 A-1 的化合物。粘合剂组合物可包括交联剂、催化剂和溶剂中的至少一种。压印光刻叠层可包括基底和粘附在基底上的粘附层,其中粘附层包括式 A-1 化合物。在压印光刻基底上形成附着层包括将粘合剂组合物置于压印光刻基底上,并聚合粘合剂组合物以在基底上生成附着层,其中粘合剂组合物包括式 A-1 的化合物,其中 n 为整数,R 为 C1-10 烷基。