Efficient and reproducible production of a copolymer for lithography, which has stable quality, with little lot-to-lot variations, and is suited for film-forming and coating compositions. Radical polymerization of a monomer, which contains at least one ethylenic double bond, with an initiator, in a solvent, and purification of the reaction mixture by precipitation and filtration, in a hermetically-closable single vessel divided by a filter medium, into a first section provided with fluid feeding means and agitating means, and a second section with fluid drawing means. Feeding the reaction mixture from the fluid feeding means into the first section of the vessel, containing a poor solvent, and contacting the reaction mixture with the poor solvent to precipitate a solid; and filtering the resulting fluid, containing the precipitated solid, through the filter medium, drawing the resultant filtrate through the fluid drawing means, and then separating the precipitated solid.
高效、可重复地生产一种用于光刻技术的共聚物,该共聚物质量稳定,批次间差异小,适用于成膜和涂层组合物。将含有至少一个
乙烯双键的单体与
引发剂在溶剂中进行辐射聚合,并通过沉淀和过滤对反应混合物进行纯化,反应混合物在一个密封的、可封闭的容器中被过滤介质分成两个部分,第一部分装有流体进料装置和搅拌装置,第二部分装有流体抽吸装置。将反应混合物从流体进料装置送入容器的第一部分,其中装有贫溶剂,将反应混合物与贫溶剂接触,使固体沉淀;通过过滤介质过滤所产生的含有沉淀固体的流体,通过流体牵引装置牵引所产生的滤液,然后分离沉淀固体。