Liquid crystalline composition for the use in a twisted nematic cell
申请人:MERCK PATENT GmbH
公开号:EP0423520B1
公开(公告)日:1995-08-02
FRAGRANCE COMPOSITION
申请人:International Flavors & Fragrances Inc.
公开号:EP3339406B1
公开(公告)日:2020-02-12
METHOD FOR FORMING RESIST PATTERN AND COMPOSITION FOR FORMING PROTECTIVE FILM
申请人:MARUYAMA Ken
公开号:US20130059252A1
公开(公告)日:2013-03-07
A method for forming a resist pattern includes providing a resist film. A protective film is provided on the resist film using a composition for forming the protective film. The composition includes a polymer and an organic solvent. The resist film on which the protective film is provided is exposed to irradiation with EUV light or an electron beam. The exposed resist film is developed.