A (meth)acrylic monomer is represented by general formula (1) (wherein R
1
represents a hydrogen atom or a methyl group; R
2
to R
4
independently represent —CH
3
or —CH
2
—O—R
5
, wherein at least one of R
2
to R
4
represents —CH
2
—O—R; R
5
represents an alkyl group having 1 to 4 carbon atoms; and Z represents multiple atoms necessary for the formation of an alicyclic hydrocarbon group having 3 to 10 carbon atoms in conjunction with a carbon atom). The (meth)acrylic monomer has a property of high acid degradability and can be removed by the action of an acid.
(甲基)
丙烯酸单体由通式(1)表示(其中R1表示氢原子或甲基基团;R2至R4独立地表示—
CH3或—
CH2—O—R5,其中至少一个R2至R4表示— —O—R;R5表示具有1至4个碳原子的烷基基团;Z表示多个原子,与一个碳原子一起形成具有3至10个碳原子的脂
环烃基团)。(甲基)
丙烯酸单体具有高酸降解性能,可以被酸作用去除。