CHEMICALLY AMPLIFIED PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE DRY FILM, METHOD OF MANUFACTURING PATTERNED RESIST FILM, METHOD OF MANUFACTURING SUBSTRATE WITH TEMPLATE, METHOD OF MANUFACTURING PLATED ARTICLE, AND COMPOUND
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20200209739A1
公开(公告)日:2020-07-02
A chemically amplified photosensitive composition which forms a resist pattern whose cross-sectional shape is rectangular, and which has a wide depth of focus margin; a photosensitive dry film having a photosensitive layer made from the composition; a method of manufacturing a patterned-resist film using the composition; a method of manufacturing a substrate with a template using the composition; a method of manufacturing a plated article using the substrate with a template; and a novel compound. An acid diffusion suppressing agent having a specific structure is blended into the composition including an acid generator which generates acid upon exposure to an irradiated active ray or radiation.
Photosensitive compositions and applications thereof
申请人:PROMERUS, LLC
公开号:US11537045B2
公开(公告)日:2022-12-27
The present invention relates to photosensitive compositions containing polynorbornene (PNB) polymers and certain additives that are useful for forming microelectronic and/or optoelectronic devices and assemblies thereof, and more specifically to compositions encompassing PNBs and certain multifunctional crosslinking agents, and two or more phenolic compounds which are resistant to thermo-oxidative chain degradation and exhibit improved mechanical properties.
POSITIVE PHOTORESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:EP1644426B1
公开(公告)日:2009-06-17
PHOTOSENSITIVE COMPOSITIONS AND APPLICATIONS THEREOF
申请人:PROMERUS, LLC
公开号:US20210116807A1
公开(公告)日:2021-04-22
The present invention relates to photosensitive compositions containing polynorbornene (PNB) polymers and certain additives that are useful for forming microelectronic and/or optoelectronic devices and assemblies thereof, and more specifically to compositions encompassing PNBs and certain multifunctional crosslinking agents, and two or more phenolic compounds which are resistant to thermo-oxidative chain degradation and exhibit improved mechanical properties.