1,4-Dioxaspiro[4.5]decan-6-yl methanesulfonate | 1101834-68-7

• 分子结构分类: 有机化合物 - 有机氧化合物
• 英文名称: 1,4-Dioxaspiro[4.5]decan-6-yl methanesulfonate
• CAS: 1101834-68-7
• 化学式: C₉H₁₆O₅S
• 分子量: 236.289
• InChiKey: QEXGRXIZKPLYFL-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  0.4
• 重原子数：
  15
• 可旋转键数：
  2
• 环数：
  2.0
• sp3杂化的碳原子比例：
  1.0
• 拓扑面积：
  70.2
• 氢给体数：
  0
• 氢受体数：
  5

反应信息

• 作为产物：
  描述：

  2-hydroxycyclohexanone ethylene ketal 、 甲基磺酰氯 在 三乙胺 作用下， 以 四氢呋喃 为溶剂， 反应 6.0h， 以75%的产率得到1,4-Dioxaspiro[4.5]decan-6-yl methanesulfonate
  参考文献：
  名称：

  Acid-amplifier having acetal group, photoresist composition including the same and method for forming a photoresist pattern

  摘要：

  公开号：

  EP2017274B1

文献信息

• ACID-AMPLIFIER HAVING ACETAL GROUP AND PHOTORESIST COMPOSITION INCLUDING THE SAME
  申请人：Lee Jung-Youl

  公开号：US20090023093A1

  公开（公告）日：2009-01-22

  An acid-amplifier having an acetal group and a photoresist composition including the same, are disclosed. The acid-amplifier produces an acid (second acid) during a post-exposure-bake (PEB), which is induced by an acid (first acid) generated from a photo-acid generator (PAG) at the exposure process so that a line edge roughness (LER) of the photoresist pattern and photoresist energy sensitivity are improved. The acid-amplifier has a structure of following Formula 1. in Formula 1, R is C 4 ˜C 20 mono-cyclic or multi-cyclic saturated hydrocarbon, R 1 is C 1 ˜C 10 linear hydrocarbon, C 1 ˜C 10 perfluoro compound or C 5 ˜C 20 aromatic compound, R a and R b are independently hydrogen atom or C 1 ˜C 4 saturated hydrocarbon and A is independently oxygen atom (0) or sulfur atom (S).
• US7935474B2
  申请人：——

  公开号：US7935474B2

  公开（公告）日：2011-05-03
• Acid-amplifier having acetal group, photoresist composition including the same and method for forming a photoresist pattern
  申请人：DONGJIN SEMICHEM CO., LTD

  公开号：EP2017274B1

  公开（公告）日：2011-03-30