申请人:Hatakeyama Jun
公开号:US20130029269A1
公开(公告)日:2013-01-31
A positive resist composition comprising a polymer having carboxyl groups substituted with an acid labile group having formula (1) exhibits a high contrast of alkaline dissolution rate before and after exposure, a high resolution, a good pattern profile and minimal edge roughness. In formula (1), A is —(CR
2
2
)
m
—, B is —(CR
5
2
)
n
—, R
2
and R
5
are hydrogen or alkyl, m and n are 1 or 2, R
3
is alkyl, alkenyl, alkynyl or aryl, R
6
is alkyl, alkoxy, alkanoyl, alkoxycarbonyl, hydroxyl, nitro, aryl, halogen, or cyano, and p is 0 to 4.
具有以下化学式(1)的酸敏聚合物,其羧基被酸敏基取代的正性光刻胶组合物,在曝光前后呈现高对比度的碱性溶解速率、高分辨率、良好的图案轮廓和最小的边缘粗糙度。在化学式(1)中,A为—(CR22)m—,B为—(CR52)n—,R2和R5为氢或烷基,m和n为1或2,R3为烷基、烯基、炔基或芳基,R6为烷基、烷氧基、烷酰基、烷氧羰基、羟基、硝基、芳基、卤素或氰基,p为0至4。