There is provided a polyimide layered product with a support which has a smooth surface to enable a sophisticated device to be formed thereon and in which the layered polyimide does not peel off even in a high-temperature process on device formation, and furthermore, the polyimide layered product can be peeled off easily from the support after the device is formed on the polyimide layered product. By preparing a polyimide film with a face at the support side and subjected to a surface treatment; subjecting at least one of a face of the support and the face of the polyimide film which are opposite to each other to a patterning treatment using a coupling agent to form a satisfactorily bondable part and an easily releasable part which differ in adhesion/peel strength; subsequently, superposing the support and the polyimide film to be subjected to a pressurizing/heating treatment and to be bonded to each other; subjecting the surface of the polyimide film to an organic alkali treatment; and then, applying a polyamic acid solution free from a slip agent ingredient, drying the coating film and imidizing the film, a layered product having a structure of at least three layers in which at least one layer contains a slip agent material and both surface layers have no slip agent material is produced.
本发明提供了一种具有支撑面的聚
酰亚胺分层产品,该支撑面表面光滑,可在其上形成精密装置,而且即使在装置形成的高温过程中,分层聚
酰亚胺也不会剥落,此外,在聚
酰亚胺分层产品上形成装置后,聚
酰亚胺分层产品可以很容易地从支撑面上剥落。通过制备表面位于支撑面的聚
酰亚胺薄膜并对其进行表面处理;使用
偶联剂对支撑面和聚
酰亚胺薄膜相对面中的至少一个面进行图案化处理,以形成粘
合力/剥离强度不同的可粘合部分和易剥离部分;然后,将支撑面和聚
酰亚胺薄膜叠加在一起,进行加压/加热处理并相互粘合;将聚
酰亚胺薄膜的表面进行有机碱处理;然后,涂上不含防滑剂成分的聚
酰胺酸溶液,干燥涂膜并使薄膜
酰亚胺化,这样就制成了一种具有至少三层结构的分层产品,其中至少一层含有防滑剂材料,而两层表面均不含防滑剂材料。