申请人:——
公开号:US20040241580A1
公开(公告)日:2004-12-02
A radiation-sensitive resin composition comprising an acid-labile group-containing resin and a photoacid generator is disclosed. The resin has a structure of the formula (1),
1
wherein R
1
represents a hydrogen atom, a monovalent acid-labile group, an alkyl group having 1-6 carbon atoms which does not have an acid-labile group, or an alkylcarbonyl group having 2-7 carbon atoms which does not have an acid-labile group, X
1
represents a linear or branched fluorinated alkyl group having 1-4 carbon atoms, and R
2
represents a hydrogen atom, a linear or branched alkyl group having 1-10 carbon atoms, or a linear or branched fluorinated alkyl group having 1-10 carbon atoms. The resin composition exhibits high transmittance of radiation, high sensitivity, resolution, and pattern shape, and is useful as a chemically amplified resist in producing semiconductors at a high yield.
本发明公开了一种辐射敏感的树脂组合物,包括含有酸敏感基团的树脂和光酸发生剂。该树脂的结构为式(1),其中R1代表氢原子、一价酸敏感基团、具有1-6个碳原子且不具有酸敏感基团的烷基或具有2-7个碳原子且不具有酸敏感基团的烷基羰基基团,X1代表具有1-4个碳原子的线性或支链氟代烷基团,R2代表氢原子、具有1-10个碳原子的线性或支链烷基团或具有1-10个碳原子的线性或支链氟代烷基团。该树脂组合物表现出辐射的高透过率、高敏感性、高分辨率和良好的图案形状,并可作为化学放大型抗蚀剂在高产率下制造半导体。