Size-Driven Inversion of Selectivity in Esterification Reactions: Secondary Beat Primary Alcohols
作者:Stefanie Mayr、Marta Marin-Luna、Hendrik Zipse
DOI:10.1021/acs.joc.0c02848
日期:2021.2.19
alcohols carrying large aromatic side chains with anhydrides differing in size and electronic structure have been measured. While primary alcohols react faster than secondary ones in transformations with monosubstituted benzoic anhydridederivatives, relative reactivities are inverted in reactions with sterically biased 1-naphthyl anhydrides. Further analysis of reaction rates shows that increasing substrate
HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS USING THE HARDMASK COMPOSITION
申请人:SAMSUNG SDI CO., LTD.
公开号:US20150329718A1
公开(公告)日:2015-11-19
A hardmask composition and a method of forming patterns, the composition including a solvent; and a polymer including a moiety represented by the following Chemical Formula 1,
一种硬掩模组合物和形成图案的方法,该组合物包括溶剂;以及包括以下化学式1所表示的基团的聚合物。
HARVEY, R. G.;KONIECZNY, M.;PATAKI, J., J. ORG. CHEM., 1983, 48, N 17, 2930-2932
作者:HARVEY, R. G.、KONIECZNY, M.、PATAKI, J.
DOI:——
日期:——
MONOMER FOR HARDMASK COMPOSITION, HARDMASK COMPOSITION INCLUDING MONOMER, AND PATTERN FORMING METHOD USING HARDMASK COMPOSITION
申请人:Choi Yoo-Jeong
公开号:US20150008212A1
公开(公告)日:2015-01-08
Disclosed are a monomer for a hardmask composition represented by the Chemical Formula 1, a hardmask composition including the monomer, and a method of forming a pattern.
AROMATIC RESINS FOR UNDERLAYERS
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20150315333A1
公开(公告)日:2015-11-05
Polymeric reaction products of certain aromatic alcohols with certain diaryl-substituted aliphatic alcohols are useful as underlayers in semiconductor manufacturing processes.