A moisture-sensitive element composed of an insulating substrate (1), a pair of electrodes (2, 3) provided on the substrate, and moisture-sensitive material (8) covering the electrodes. The resistance of the moisture-sensitive material (8) depends on the moisture content of atmosphere, and it is made of corpuscles each of which is composed of a hydrophobic nucleus and a surface layer covering the nucleus which contains ionic or hydrophilic radicals. In this moisture-sensitive element, the relation between the logarithm of its electrical resistance and the relative humidity is nearly linear and it has small hysteresis, so that the relative humidity can be measured exactly. The insulating substrate (1) and the electrodes (2, 3) are preferably made of an insulating layer formed on a silicon semiconductor and conductive polysilicon formed thereon, respectively, so it can be miniaturized.
一种湿度敏感元件,由绝缘基板(1)、基板上的一对电极(2、3)和覆盖电极的湿度敏感材料(8)组成。湿敏材料(8)的电阻取决于大气中的湿度,它是由一个个小球组成的,每个小球都由一个疏
水核和一个覆盖在核上的表面层组成,表面层含有离子或亲
水基。在这种湿敏元件中,其电阻的对数与相对湿度之间的关系近似线性,且滞后很小,因此可以准确测量相对湿度。绝缘基板(1)和电极(2、3)最好分别由在
硅半导体上形成的绝缘层和在其上形成的导电多晶
硅制成,这样可以使其小型化。