申请人:JSR CORPORATION
公开号:US20130288179A1
公开(公告)日:2013-10-31
A radiation-sensitive resin composition includes a compound represented by a formula (1), and a polymer that includes a structural unit having an acid-labile group. R
1
and R
4
each independently represent a hydrogen atom, or the like. R
2
and R
3
each independently represent a hydrogen atom or the like. X
1
and X
2
each independently represent a hydrogen atom, or the like, or X
1
and X
2
taken together represent —S—, —O—, —SO
2
—, or the like. A represents an ethanediyl group, wherein at least one hydrogen atom included in X
1
, X
2
and A is substituted by —Y—SO
3
−
M
+
. Y represents an alkanediyl group having 1 to 10 carbon atoms, or the like. M
+
represents a monovalent onium cation. In the case where —Y—SO
3
−
M
+
is present in a plurality of number, a plurality of Ys are each identical or different and a plurality of M
+
s are each identical or different.
一种辐射敏感的树脂组合物,包括由式(1)表示的化合物和包括具有酸敏感基团的结构单元的聚合物。其中,R1和R4各自独立地表示氢原子等。R2和R3各自独立地表示氢原子等。X1和X2各自独立地表示氢原子等,或X1和X2一起表示-S-、-O-、-SO2-等。A表示乙二酰基基团,其中X1、X2和A中包含的至少一个氢原子被-Y-SO3-M+取代。Y表示具有1到10个碳原子的脂肪二基基团等。M+表示一价的离子型阳离子。在-Y-SO3-M+存在多个的情况下,多个Y可以相同或不同,多个M+可以相同或不同。