polishing slurry and a polishing method which are suitably used in a CMP technique for flattening a surface of a substrate in a production process of a semiconductor device. The polishing slurry comprises particles and a medium in which at least a part of the particles are dispersed, wherein the particles are made of at least one of (1) a cerium compound selected from cerium oxide, cerium halide and cerium sulfide and having a density of 3 to 6 g/cm3 and an average particle diameter of secondary particles of 1 to 300 nm and (2) a tetravalent metal hydroxide. A polishing method using the polishing slurry takes advantage of a chemical action of particles in the polishing slurry and minimizes a mechanical action of the particles, thereby achieving a decrease in scratches caused by the particles and an increase in polishing rate at the same time.
抛光浆料和抛光方法,适用于半导体设备生产过程中用于使基底表面平坦化的
CMP 技术。抛光浆料包括颗粒和介质,其中至少有一部分颗粒分散在介质中,其中颗粒由以下至少一种制成:(1) 选自
氧化铈、卤化
铈和
硫化铈的
铈化合物,其密度为 3 至 6 g/cm3,次级颗粒的平均颗粒直径为 1 至 300 nm;(2) 四价
金属氢氧化物。使用抛光浆料的抛光方法可利用抛光浆料中颗粒的
化学作用,并将颗粒的机械作用降至最低,从而减少颗粒造成的划痕,同时提高抛光率。